Title:
光照射装置
Document Type and Number:
Japanese Patent JP5598239
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a light irradiation device which can form a pattern faithful to a pattern of a mask and with high resolution.SOLUTION: The light irradiation device includes a light emission part equipped with a light source element row having a plurality of light source elements arranged in one direction, each consisting of a short-arc type discharge lamp and a reflector arranged to surround the discharge lamp for reflecting light from the discharge lamp to a parallel direction to its light axis, and a mask made by arranging a number of linear shielding parts and translucent parts extended in a perpendicular direction to the above direction arranged alternately in one direction. A plurality of shielding plates each having a light-absorbing property are arrayed in the direction in a posture extending perpendicularly to the direction along the light axis of the reflector.
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Inventors:
Shigenori Nakada
Application Number:
JP2010228238A
Publication Date:
October 01, 2014
Filing Date:
October 08, 2010
Export Citation:
Assignee:
USHIO, INC.
International Classes:
F21S2/00; F21V13/12; G02B3/00; G02B3/06; G02B5/00; G02B5/10; G02B19/00; G02F1/13363; F21Y101/00
Attorney, Agent or Firm:
Oi Masahiko