Title:
プラズマ発生ユニット及び表面波励起プラズマ処理装置
Document Type and Number:
Japanese Patent JP5601348
Kind Code:
B2
Inventors:
East Japanese
Application Number:
JP2012113487A
Publication Date:
October 08, 2014
Filing Date:
May 17, 2012
Export Citation:
Assignee:
Shimadzu Corp.
International Classes:
H05H1/46; C23C16/511; H01L21/31
Attorney, Agent or Firm:
Hidekazu Miyoshi
Masakazu Ito
Masakazu Ito