Title:
ＦＴＯ／ＩＴＯ積層体を有する透明導電膜
Document Type and Number:
Japanese Patent JP5601686
Kind Code:
B2
Abstract:
A transparent conductive film for lamination on a substrate and comprising an ITO film and an FTO film, wherein a part or all of the crystal structure of a surface of the FTO film is orthorhombic, and a transparent conductive film for lamination on a substrate and comprising an ITO film and an FTO film, wherein the thickness of the FTO film is within a range from 5 nm to 20 nm and the FTO film is a continuous film. A method of producing the transparent conductive films includes depositing the ITO film on a substrate using a pyrosol process, and subsequently depositing the FTO film continuously on top of the ITO film.
Inventors:
Shigeo Yamada
Tatsuya Oashi
Tatsuya Oashi
Application Number:
JP2010517752A
Publication Date:
October 08, 2014
Filing Date:
June 22, 2009
Export Citation:
Assignee:
Nippon Soda Co., Ltd.
International Classes:
H01B5/14; B32B7/02; B32B9/00; C23C16/40; H01B13/00
Domestic Patent References:
| JP2006066892A | 2006-03-09 | |||
| JP2003323818A | 2003-11-14 | |||
| JP2005302695A | 2005-10-27 |
Attorney, Agent or Firm:
Masaki Hirota
Yusaku Tokai
Yusaku Tokai