Title:
ＢＳＰ除去装置
Document Type and Number:
Japanese Patent JP5601796
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a gas decomposition system capable of prolonging its lifetime by using a gas decomposer close to the limit of the capability of the gas decomposer while minimizing the possibility of discharge of a target gas undecomposed.SOLUTION: The gas decomposition system 40 is arranged in an exhaust gas pipe 31 which exhausts ozone gas out of a chamber 11 to be supplied with ozone gas, includes an ozone killer 41 decomposing ozone gas, a branched pipe 42 branched from the midway of the ozone killer 41, an ozone sensor 43 arranged in the branched pipe 42 to detect the concentration of ozone gas and a monitor 51a monitoring the concentration of ozone gas detected by the ozone sensor 43 and decides whether or not the ozone killer 41 reaches its lifetime according to the concentration of ozone gas monitored by the monitor 51a.
Inventors:
Takehiro Shindo
Masaki Kondo
Masaki Kondo
Application Number:
JP2009148586A
Publication Date:
October 08, 2014
Filing Date:
June 23, 2009
Export Citation:
Assignee:
Tokyo Electron, Ltd.
International Classes:
H01L21/304; B01D53/66; B01D53/86; H01L21/027; H01L21/3065
Attorney, Agent or Firm:
Hiroshi Takayama