Title:
シート切断装置及び切断方法
Document Type and Number:
Japanese Patent JP5603101
Kind Code:
B2
Inventors:
Yoshiaki Sugishita
Application Number:
JP2010034764A
Publication Date:
October 08, 2014
Filing Date:
February 19, 2010
Export Citation:
Assignee:
LINTEC Corp.
International Classes:
H01L21/683
Attorney, Agent or Firm:
Yoshio Yamaguchi