Title:
シート状モールド位置検出装置、転写装置および転写方法
Document Type and Number:
Japanese Patent JP5603621
Kind Code:
B2
Abstract:
A sheet-shaped mold position detection device 183 for conveying and positioning a sheet-shaped mold M on which a fine transfer pattern M1 is formed. The sheet-shaped mold position detection device 183 includes a sheet-shaped mold position detector 191 that detects a predetermined region of the sheet-shaped mold M by detecting transmittance of light in the sheet-shaped mold M.
Inventors:
Shinya Itani
Hiromi Nishihara
Baba a hill -- people
Takaharu Tashiro
Takashi Okawa
Hidetoshi Kitahara
Hiromi Nishihara
Baba a hill -- people
Takaharu Tashiro
Takashi Okawa
Hidetoshi Kitahara
Application Number:
JP2010050452A
Publication Date:
October 08, 2014
Filing Date:
March 08, 2010
Export Citation:
Assignee:
Toshiba Machine Co., Ltd.
International Classes:
B29C59/02; B29C33/30; B29C33/40; H01L21/027
Attorney, Agent or Firm:
Hidekazu Miyoshi
Yukikuni Iwasaki
Masakazu Ito
Toshikazu Takahashi
Toshio Takamatsu
Yukikuni Iwasaki
Masakazu Ito
Toshikazu Takahashi
Toshio Takamatsu