Title:
静電容量型電気機械変換装置
Document Type and Number:
Japanese Patent JP5603739
Kind Code:
B2
Abstract:
A capacitive electromechanical transducer in which a reception characteristic is hardly affected by an elastic wave intruding into a substrate is provided. The capacitive electromechanical transducer includes a first electric connection portion that is connected to a second electrode disposed on a surface of a substrate to draw the second electrode onto a side of a surface of the first substrate on a side opposite from a surface in which a first electrode and the second electrodes are provided. With respect to a thickness direction of a first substrate, a diaphragm with which the first electric connection portion is covered is formed on the side of the surface of the first substrate, in which the first and second electrodes are provided.
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Inventors:
Atsushi Katori
Application Number:
JP2010245847A
Publication Date:
October 08, 2014
Filing Date:
November 02, 2010
Export Citation:
Assignee:
Canon, Inc.
International Classes:
H04R19/00
Attorney, Agent or Firm:
Kazuo Kato