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Title:
薄板状ワーク研削装置及び薄板状部材の製造方法
Document Type and Number:
Japanese Patent JP5604489
Kind Code:
B2
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Inventors:
Hiroshi Aoyama
Toru Hayashida
Application Number:
JP2012213063A
Publication Date:
October 08, 2014
Filing Date:
September 26, 2012
Export Citation:
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Assignee:
Incorporated company ハリーズ
International Classes:
B24B41/06; B23Q7/04; B24B9/10; H01L21/677
Attorney, Agent or Firm:
Kazuki Amano
Yoshinori Ikeda
Hiroo Ogawa
Koji Ishida
Koju Kagami
Yoshiaki Negi
Shinjo 孝



 
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