Title:
真空処理装置
Document Type and Number:
Japanese Patent JP5604525
Kind Code:
B2
Abstract:
Provided is a low-cost vacuum processing apparatus which enables the miniaturization of the apparatus and achieves good productivity. An elongated sheet base material is transported through a vacuum processing chamber, and predetermined processing is performed on the sheet base material in this vacuum processing chamber. The vacuum processing chamber is provided with a single processing unit, and has an auxiliary vacuum chamber provided in continuation with the vacuum processing chamber. The auxiliary vacuum chamber is provided with a feed roller and a take-up roller. The vacuum processing apparatus includes a pair of first roller units provided on opposite sides across the processing unit in the vacuum processing chamber. Each of the first roller units has multiple rollers disposed at regular distances. The rollers are deviated from each other in the axial direction and arranged in such a staggered manner that the sheet base material is helically wound around the rollers.
Inventors:
Takahiro Hirono
Isao Tada
Isao Tada
Application Number:
JP2012537559A
Publication Date:
October 08, 2014
Filing Date:
September 07, 2011
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/56; C23C16/54
Domestic Patent References:
| JPS4729465A | ||||
| JPH0657415A | 1994-03-01 | |||
| JP2005113165A | 2005-04-28 | |||
| JP2007224384A | 2007-09-06 | |||
| JPH01230775A | 1989-09-14 |
Attorney, Agent or Firm:
SEIGA Patent and Trademark Corporation