Title:
テスター、及びこれを具備した半導体デバイス検査装置
Document Type and Number:
Japanese Patent JP5605943
Kind Code:
B2
Abstract:
Provided are a tester and a semiconductor device test apparatus having the tester. The tester includes a tested head configured to transfer electronic signals to a probe card. The tester also includes a leveling unit is provided on the tester head. The leveling unit is configured to apply a load to the probe card to maintain a level state of the probe card.
Inventors:
Gold 秉住
Yellow 寅 ソク
Gold 貞雨
Yellow 寅 ソク
Gold 貞雨
Application Number:
JP2010173637A
Publication Date:
October 15, 2014
Filing Date:
August 02, 2010
Export Citation:
Assignee:
Samsung Electronics Samsung Electronics Co, Inc.., Ltd.
International Classes:
G01R31/28; G01R1/073; H01L21/66
Attorney, Agent or Firm:
Takashi Watanabe
Shinya Jitsuhiro
Shinya Jitsuhiro