Title:
成膜装置及び成膜方法
Document Type and Number:
Japanese Patent JP5613243
Kind Code:
B2
Inventors:
藤井 佳詞
中村 真也
中村 真也
Application Number:
JP2012526559A
Publication Date:
October 22, 2014
Filing Date:
November 17, 2011
Export Citation:
Assignee:
株式会社アルバック
International Classes:
C23C14/35
Domestic Patent References:
| JPH0941137A | 1997-02-10 | |||
| JPS58144474A | 1983-08-27 | |||
| JP2008281958A | 2008-11-20 | |||
| JPH11229138A | 1999-08-24 | |||
| JPH0941137A | 1997-02-10 |
Foreign References:
| WO2010064493A1 | 2010-06-10 |
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Shingo Suzuki
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