Title:
試験用キャリア
Document Type and Number:
Japanese Patent JP5616119
Kind Code:
B2
Abstract:
[Problem] A test carrier able to secure a high air-tightness is provided. [Solution] A test carrier 10 comprises a cover member 50A and a base member 20A which are bonded together while sandwiching a die 90 between them. ultraviolet rays can pass through the cover member 50A.
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Inventors:
中村 陽登
小暮 吉成
小暮 吉成
Application Number:
JP2010108521A
Publication Date:
October 29, 2014
Filing Date:
May 10, 2010
Export Citation:
Assignee:
株式会社アドバンテスト
International Classes:
G01R31/26
Attorney, Agent or Firm:
It can exceed and is a patent business corporation.