Title:
ノズルプレートの製造方法
Document Type and Number:
Japanese Patent JP5616706
Kind Code:
B2
Abstract:
A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate.
Inventors:
蔡 春進
陳 聖傑
陳 宏達
陳 聖傑
陳 宏達
Application Number:
JP2010157866A
Publication Date:
October 29, 2014
Filing Date:
July 12, 2010
Export Citation:
Assignee:
國立交通大學
International Classes:
G01N15/02; B41J2/16
Attorney, Agent or Firm:
Masaki Hattori