Title:
シロキサンポリマー組成物、硬化膜及び硬化膜の形成方法
Document Type and Number:
Japanese Patent JP5617476
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a siloxane polymer composition suitable for a discharge nozzle coating method and enabling formation of a cured film as a protective film and an interlayer insulating film having excellent appearance and no coating irregularity, achieving high flatness (uniformity in film thickness) and high-speed coating, and having excellent transparency and scratch resistance.SOLUTION: The siloxane polymer composition contains [A] a siloxane polymer having a radical reactive functional group, [B] a radical polymerization initiator and [C] an organic solvent, and has a solid content concentration of 5 mass% or more and 30 mass% or less and a viscosity of 2.0 mPa s or more and 10 mPa s or less at 25°C. The composition contains at least an organic solvent (C1) having a vapor pressure of 0.1 mmHg or more and less than 1 mmHg at 20°C as the [C] organic solvent.
Inventors:
上田 二朗
一戸 大吾
一戸 大吾
Application Number:
JP2010212868A
Publication Date:
November 05, 2014
Filing Date:
September 22, 2010
Export Citation:
Assignee:
ＪＳＲ株式会社
International Classes:
G03F7/075; B05D7/24; C08G77/04; G03F7/004; G03F7/16
Attorney, Agent or Firm:
Kazuki Amano
Fujimoto 勝誠
Yoshinori Ikeda
Hiroo Ogawa
Sanae Kato
Masaru Okutani
Fujimoto 勝誠
Yoshinori Ikeda
Hiroo Ogawa
Sanae Kato
Masaru Okutani