Title:
炭化ケイ素微粉末の製造方法及びその製造装置
Document Type and Number:
Japanese Patent JP5618302
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing high purity, high quality fine silicon carbide powder efficiently in a short time while saving energy, which is developed to solve a problem in the synthesis of silicon carbide using electromagnetic wave-irradiation, makes a reaction occur uniformly over an entire charged raw material, and is easy to control and administrate the temperature of the reaction; and an apparatus for the method.SOLUTION: In the method for producing silicon carbide powder by the carbothermal reduction of silica with the use of electromagnetic wave-irradiation, the raw material 4 containing a silica source and a carbon source, after being packed in a heat resistant reactor 5 which has a byproduct gas vent hole 14 and in which a self heating material 13 is arranged in the peripheral part and a heat resistant porous insulating material 6 is arranged around the self heating material 13, is irradiated with electromagnetic waves, so that the raw material 4 is heated in a non-oxidative atmosphere through the self heating material 13 to obtain the fine silicon carbide powder.
Inventors:
平尾 喜代司
近藤 直樹
日向 秀樹
周 游
近藤 直樹
日向 秀樹
周 游
Application Number:
JP2011118183A
Publication Date:
November 05, 2014
Filing Date:
May 26, 2011
Export Citation:
Assignee:
独立行政法人産業技術総合研究所
International Classes:
C01B31/36; H05B6/64
Attorney, Agent or Firm:
Toshio Nishizawa