Title:
電動式ステージ
Document Type and Number:
Japanese Patent JP5620503
Kind Code:
B2
Abstract:
A stage comprising a first translation platform having a first axis of motion, and a second translation platform having a second axis of motion, a first linear drive motor for driving the first translation platform in the first axis of motion, and a second linear drive motor for driving the second translation platform in the second axis of motion, wherein each linear drive motor further comprises a coil assembly enclosing a rod stator, and wherein the coil assembly is fixed and the rod stator is movable within the coil assembly.
Inventors:
ジェフリー エス ブルッカー
パウロ チャヴェス
キース ディーズ
ロビン エディントン
パウロ チャヴェス
キース ディーズ
ロビン エディントン
Application Number:
JP2012534434A
Publication Date:
November 05, 2014
Filing Date:
October 16, 2010
Export Citation:
Assignee:
ソルラブス、インコーポレイテッドＴｈｏｒｌａｂｓ， Ｉｎｃ．
International Classes:
G02B21/24
Attorney, Agent or Firm:
Michiharu Soga
Jun Kajinami
Toshikazu Ueda
Junichiro Yoshida
Yoshikazu Takei
Yoshiyuki Tamura
Takahiro Matsuoka
Kimihiro Bessho
Shuji Shigeizumi
Jun Kajinami
Toshikazu Ueda
Junichiro Yoshida
Yoshikazu Takei
Yoshiyuki Tamura
Takahiro Matsuoka
Kimihiro Bessho
Shuji Shigeizumi