Title:
機能素子、機能素子の製造方法、物理量センサー及び電子機器
Document Type and Number:
Japanese Patent JP5622105
Kind Code:
B2
Inventors:
河野 秀逸
Application Number:
JP2010292289A
Publication Date:
November 12, 2014
Filing Date:
December 28, 2010
Export Citation:
Assignee:
セイコーエプソン株式会社
International Classes:
G01P15/125; B81B3/00; B81C3/00; H01L29/84
Attorney, Agent or Firm:
Murakami Tomoichi
Takahiro Deguchi
Takahiro Deguchi