Title:
オゾンガス発生装置の製造方法
Document Type and Number:
Japanese Patent JP5629443
Kind Code:
B2
Inventors:
松野 敬
竹村 理
竹村 理
Application Number:
JP2009205009A
Publication Date:
November 19, 2014
Filing Date:
September 04, 2009
Export Citation:
Assignee:
住友精密工業株式会社
International Classes:
C01B13/11
Attorney, Agent or Firm:
Patent business corporation MAEDA PATENT OFFICE
Hiroshi Maeda
Hiroshi Takeuchi
Shimada Takaku
Yuji Takeuchi
Katsuya Ninomiya
Tomoo Harada
Katsumori Iseki
Seki 啓
Seiya Sugiura
Hiroshi Maeda
Hiroshi Takeuchi
Shimada Takaku
Yuji Takeuchi
Katsuya Ninomiya
Tomoo Harada
Katsumori Iseki
Seki 啓
Seiya Sugiura