Title:
光学モニタリングシステムを有する表面粗さ測定装置
Document Type and Number:
Japanese Patent JP5629818
Kind Code:
B2
Abstract:
Surface sensing device comprising an optical monitoring system for measuring a displacement of a hollow stylus tip with respect to a stylus carrier. The optical monitoring system comprises an optically encoding component (100) positioned in the stylus carrier in the optical return path and designed to transform the information of an impinging position (50,50') of the returned beam upon the optical encoding component (100) into a change of the characteristics distribution of the returned beam, and the detector means is sensitive for the at least two distinguishable light characteristics and built for generating the electrical output signal dependent on the changed characteristics distribution of the returned beam.
Inventors:
イェンセン，トーマス
ジールクス，クヌート
ジールクス，クヌート
Application Number:
JP2013508436A
Publication Date:
November 26, 2014
Filing Date:
April 27, 2011
Export Citation:
Assignee:
ライカ ジオシステムズ アクチェンゲゼルシャフトＬｅｉｃａ Ｇｅｏｓｙｓｔｅｍｓ ＡＧ
International Classes:
G01B21/30; G01B11/00; G01B21/00
Attorney, Agent or Firm:
Patent business corporation Tsukuni
Hajime Tsukuni
Yasuo Yanagibashi
Ito 佐保子
Keiko Ozawa
Toshio Miyake
Yasuhiro Kokuni
Yoko Tanaka
Yoshinori Ubukawa
Akio Shibata
Hajime Tsukuni
Yasuo Yanagibashi
Ito 佐保子
Keiko Ozawa
Toshio Miyake
Yasuhiro Kokuni
Yoko Tanaka
Yoshinori Ubukawa
Akio Shibata