Title:
光学ユニット、照明光学装置、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP5630455
Kind Code:
B2
Abstract:
The present invention pertains to an optical unit which can be arranged in optical system of an illumination apparatus for illuminating a first surface with light from a light source, the optical unit comprising a light splitter to split an incident beam traveling in an incident light path, into a plurality of beams; a first spatial light modulator which can be arranged in an optical path of a first beam out of the plurality of beams and which forms a desired illuminant distribution at a pupil plane of the illumination apparatus; a second spatial light modulator which can be arranged in an optical path of a second beam out of the plurality of beams and which forms a desired illuminant distribution at the pupil plane of the illumination apparatus; and a light combiner to combine a beam having passed via the first spatial light modulator, with a beam having passed via the second spatial light modulator, and to direct a resultant beam to an exiting light path; wherein at least one spatial light modulator out of the first spatial light modulator and the second spatial light modulator includes a plurality of optical elements arranged two-dimensionally and controlled individually; wherein the incident light path on the light splitter side and the exiting light path on the light combiner side extend in the same direction; and, wherein the light splitter includes a polarization separating film.
Inventors:
谷津 修
Application Number:
JP2012080374A
Publication Date:
November 26, 2014
Filing Date:
March 30, 2012
Export Citation:
Assignee:
株式会社ニコン
International Classes:
H01L21/027; G02B3/00; G02B5/04; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Seiji Ono
Eiryou Kobayashi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
Eiryou Kobayashi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani