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Patent Searching and Data


Title:
直接描画方法および直接描画装置
Document Type and Number:
Japanese Patent JP5637771
Kind Code:
B2
Inventors:
Masahiro Yamamoto (1 of the 1st 4-chome, 堀川通寺之内上る, Kamigyo-ku, Kyoto-shi Tenjin north town Inside of Dainippon Screen Mfg. Co., Ltd.)
Hideki Adachi (1 of the 1st 4-chome, 堀川通寺之内上る, Kamigyo-ku, Kyoto-shi Tenjin north town Inside of Dainippon Screen Mfg. Co., Ltd.)
Masahide Okazaki (1 of the 1st 4-chome, 堀川通寺之内上る, Kamigyo-ku, Kyoto-shi Tenjin north town Inside of Dainippon Screen Mfg. Co., Ltd.)
Akihiro Nomura (1 of the 1st 4-chome, 堀川通寺之内上る, Kamigyo-ku, Kyoto-shi Tenjin north town Inside of Dainippon Screen Mfg. Co., Ltd.)
Chichibu Takao (1 of the 1st 4-chome, 堀川通寺之内上る, Kamigyo-ku, Kyoto-shi Tenjin north town Inside of Dainippon Screen Mfg. Co., Ltd.)
Application Number:
JP2010182149A
Publication Date:
December 10, 2014
Filing Date:
August 17, 2010
Export Citation:
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Assignee:
SCREEN, Inc. holdings (1 of the 1st 4-chome, 堀川通寺之内上る, Kamigyo-ku, Kyoto-shi Tenjin north town)
International Classes:
G03F7/20; G03F9/00; H01L21/02; H01L21/027