圧電薄膜素子 - パナソニック株式会社

Title:

圧電薄膜素子

Document Type and Number:

Japanese Patent JP5643472

Kind Code:

B2

Abstract:

To provide a piezoelectric thin-film element which has superior piezoelectric characteristics and dielectric loss by using a lead-free piezoelectric material.

The piezoelectric thin-film element comprises a lower electrode layer 2, first piezoelectric material layers 3 and 4, and an upper electrode layer 5 on a substrate 1, wherein the first piezoelectric material layers 3 and 4 comprise laminated piezoelectric material layers having a potassium-niobate-based perovskite structure shown by KxNbO3and KyNbO3, thereby actualizing the piezoelectric thin-film element which has superior piezoelectric characteristics and dielectric loss and is composed of a lead-free material under conditions of x<1.0 and y≥1.0.

Inventors:

山本健樹
小牧一樹
和田隆博

Application Number:

JP2007277941A

Publication Date:

December 17, 2014

Filing Date:

October 25, 2007

Export Citation:

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Assignee:

パナソニック株式会社
学校法人龍谷大学

International Classes:

H01L41/083; H01L41/08; H01L41/18; H01L41/187; H01L41/22; H01L41/29; H01L41/316; H01L41/39

Attorney, Agent or Firm:

Mutsumi Sameshima
Yasuo Tamura
Yasuhiro Kitahara

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