Title:
圧電素子およびその製造方法
Document Type and Number:
Japanese Patent JP5643561
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of maintaining the strength during a manufacturing process and sufficiently relaxing the stress during operation after manufacture.SOLUTION: A piezoelectric element 100 in which piezoelectric layers 110 and internal electrodes 120 are alternately stacked and which expands and contracts by applying a voltage, includes: a semi-stress relaxation layer 140 which is formed of an unsintered material or a void and is closed to the outer periphery at a periphery of an active region where projections of the internal electrodes 120 in a stacking direction overlap; and a stress relaxation layer 150 which relaxes the stress caused by driving and is formed by opening the semi-stress relaxation layer 140 to the outer periphery. With this configuration, the semi-stress relaxation layer 140 is closed to the outer periphery, and thus the piezoelectric element 100 can have the strength against the load in a direction vertical to a stacking direction Z. The stress relaxation layer 150 can relax the stress generated in a state in which a voltage is applied to the piezoelectric element 100.
Inventors:
阿隅 一将
熊本 憲二
熊本 憲二
Application Number:
JP2010163192A
Publication Date:
December 17, 2014
Filing Date:
July 20, 2010
Export Citation:
Assignee:
太平洋セメント株式会社
株式会社日本セラテック
株式会社日本セラテック
International Classes:
H01L41/083; H01L41/09; H01L41/187; H01L41/22; H01L41/257; H01L41/273; H01L41/297; H01L41/39
Attorney, Agent or Firm:
Fukuchi Takeo
Yoichi Shirakawa
Yoichi Shirakawa