Title:
照明光学装置
Document Type and Number:
Japanese Patent JP5644921
Kind Code:
B2
Inventors:
谷津 修
西永 壽
工藤 威人
西永 壽
工藤 威人
Application Number:
JP2013186432A
Publication Date:
December 24, 2014
Filing Date:
September 09, 2013
Export Citation:
Assignee:
株式会社ニコン
International Classes:
H01L21/027; G02B5/04; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Seiji Ono
Eiryou Kobayashi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani
Eiryou Kobayashi
Shinji Kato
Mamoru Suzuki
Hiroshi Otani