Title:
静圧気体軸受
Document Type and Number:
Japanese Patent JP5645560
Kind Code:
B2
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Inventors:
下村 嘉士
Application Number:
JP2010200883A
Publication Date:
December 24, 2014
Filing Date:
September 08, 2010
Export Citation:
Assignee:
キヤノン株式会社
International Classes:
F16C32/06
Attorney, Agent or Firm:
近島 One husband
Takashi Ota
Takashi Ota