Title:
静電容量型圧力センサおよび静電容量型圧力センサの製造方法
Document Type and Number:
Japanese Patent JP5649474
Kind Code:
B2
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Inventors:
岡田 瑞穂
Application Number:
JP2011013886A
Publication Date:
January 07, 2015
Filing Date:
January 26, 2011
Export Citation:
Assignee:
ローム株式会社
International Classes:
G01L9/00; H01L29/84
Attorney, Agent or Firm:
Kosaku Inaoka
Kawasaki Real husband
Kawasaki Real husband