Title:
微分型電気移動度分級装置、粒子計測システム、及び粒子選別システム
Document Type and Number:
Japanese Patent JP5652851
Kind Code:
B2
Abstract:
In order to provide a differential mobility analyzer and the like that allows (i) easy increase of an upper limit of particle size of charged particle which can be classified and (ii) analysis of charged particles whose particle size is variable, a DMA (Differential Mobility Analyzer) includes: a classification tank in which an inlet electrode having an inlet slit, an intermediate electrode having a slit, and an outlet electrode having an outlet slit are arranged in sequence in such a manner that adjacent electrodes are disposed opposing each other at predetermined intervals; a gas supply section supplying the classification tank with sheath gas; and a voltage generator applying a predetermined voltage between the electrodes disposed opposing each other, the classification tank including a first classification section and a second classification section each formed by the electrodes disposed opposing each other, and the gas supply section controlling a flow rate of the sheath gas to be supplied to the classification tank individually per first classification section and second classification section.
Inventors:
折井 孝彰
工藤 聡
工藤 聡
Application Number:
JP2010021552A
Publication Date:
January 14, 2015
Filing Date:
February 02, 2010
Export Citation:
Assignee:
独立行政法人理化学研究所
International Classes:
G01N15/02; B03C7/02; G01N1/02; G01N15/06; G01N27/622
Attorney, Agent or Firm:
Patent business corporation HARAKENZO WORLD PATENT & TRADEMARK