Title:
ＭＩＭ積分キャパシタを有するボロメータピクセル
Document Type and Number:
Japanese Patent JP5667777
Kind Code:
B2
Abstract:
The device has metal levels (M1, M4-M6) and an array of thermal detectors i.e. bolometer sensors, formed on a support i.e. reference bolometer. Each detector has a membrane (210) that absorbs the radiant energy and provides electric signals depending on the absorbed energy. A reading unit reads the electric signals from the membrane. An integrator of the reading unit is provided with a metal-insulating metal (MIM) integration capacitor arranged opposite to the membrane. An upper plate (244) of the capacitor is arranged in the given interconnection metal level of the set of metal levels.
Inventors:
バートランド デュポン
Application Number:
JP2010078627A
Publication Date:
February 12, 2015
Filing Date:
March 30, 2010
Export Citation:
Assignee:
コミサリア ア レネルジ アトミ−ク エ オ エネルジー アルテルナティヴ
International Classes:
G01J1/02; G01J5/20; G01J5/48
Attorney, Agent or Firm:
Kenji Sugimura
the U. K. Tribute
Makoto Fukuo
the U. K. Tribute
Makoto Fukuo
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