Title:
保持装置、インプリント装置及び物品の製造方法
Document Type and Number:
Japanese Patent JP5669466
Kind Code:
B2
Abstract:
A holding device of the present invention for holding a mold, the device includes a holder configured to attract the mold to hold the mold; an actuator supported by the holder so as to face a side of the mold, and configured to apply a force to the side to deform the mold; and a detector supported by the holder so as to face the side, and configured to detect a position of the side in a direction of the force. Here, the detector is configured to detect, as the position, a position of a first region in the side, the actuator is configured to apply the force to a second region in the side, and the second region is around the first region.
Inventors:
鳥居 弘稔
Application Number:
JP2010157845A
Publication Date:
February 12, 2015
Filing Date:
July 12, 2010
Export Citation:
Assignee:
キヤノン株式会社
International Classes:
H01L21/027; B29C59/02; G03F7/20
Attorney, Agent or Firm:
Ryoichi Takaoka