波長可変干渉フィルター、光モジュール、及び光分析装置

Japanese Patent JP5673049

B2

A wavelength-variable interference filter includes first and second electrodes provided at first and second substrates, respectively, the second substrate including a movable section, first and second electrode wires that extend from the first and second electrodes toward outer circumferential edges of the first and second substrates, respectively, a first opposite electrode wire disposed so as to be isolated from the second electrode, and a first conductive section that connects the first electrode wire with the first opposite electrode wire. The second electrode wire and the first opposite electrode wire extend passing through a center point of an imaginary circle of the movable section in respective directions and dividing the imaginary circle at regular angular intervals.

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WO/2019/009393	OPTICAL DEVICE AND METHOD FOR MANUFACTURING SAME
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松下 友紀
松野 靖史

JP2010273264A

February 18, 2015

December 08, 2010

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セイコーエプソン株式会社

G02B26/00; G02B5/28; H01L31/10

Masaaki Kamiyanagi
Osamu Suzawa
Kazuhiko Miyasaka

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