Title:
カーボンナノチューブの形成方法及び熱拡散装置
Document Type and Number:
Japanese Patent JP5673325
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enhance controllability of a diameter of carbon nanotubes and to increase growth density thereof, as regards a method for forming the carbon nanotubes and a thermal diffusion apparatus.SOLUTION: A fine unevenness forming layer having fine unevenness with an average period of 20-100 nm is formed on the surface of a substrate. An oxygen-containing film having a shape along the shape of the unevenness is formed on the surface of the unevenness forming layer. After forming a catalyst metal layer on the oxygen-containing film, the catalyst metal layer is melted by heat treatment and is converted into a plurality of isolated catalyst fine particles. The carbon nanotubes are grown on the catalyst fine particles by chemical vapor deposition using a carbon-containing gas.
Inventors:
崎田 幸恵
岩井 大介
山口 佳孝
廣瀬 真一
乘松 正明
曽我 育生
八木下 洋平
岩井 大介
山口 佳孝
廣瀬 真一
乘松 正明
曽我 育生
八木下 洋平
Application Number:
JP2011093623A
Publication Date:
February 18, 2015
Filing Date:
April 20, 2011
Export Citation:
Assignee:
富士通株式会社
International Classes:
C01B31/02; B82Y40/00; C23C16/26; H01L23/36
Attorney, Agent or Firm:
Kenji Doi
Wood Tsunenori
Shoji Kashiwatani
Koichi Watanabe
Kiyoshi Manabe
Toshiro Ito
Wood Tsunenori
Shoji Kashiwatani
Koichi Watanabe
Kiyoshi Manabe
Toshiro Ito