薄膜蒸着装置、これを利用した有機発光ディスプレイ装置の製造方法及びこれにより製造された有機発光ディスプレイ装置

Japanese Patent JP5677827

B2

A thin film deposition apparatus, a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus, and an organic light-emitting display device manufactured by using the method. The thin film deposition apparatus includes: a deposition source that discharges a deposition material; a deposition source nozzle unit disposed at a side of the deposition source and including a plurality of deposition source nozzles arranged in a first direction; a patterning slit sheet disposed opposite to the deposition source nozzle unit and including a plurality of patterning slits having different lengths arranged in the first direction; and a barrier plate assembly disposed between the deposition source nozzle unit and the patterning slit sheet in the first direction, and including a plurality of barrier plates that partition a space between the deposition source nozzle unit and the patterning slit sheet into a plurality of sub-deposition spaces, wherein the thin film deposition apparatus is separated from the substrate by a predetermined distance, and the thin film deposition apparatus and the substrate are movable relative to each other.

李 潤 美
金 相 洙
趙 昌 睦
朴 鉉 淑

JP2010286214A

February 25, 2015

December 22, 2010

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三星ディスプレイ株式會社Ｓａｍｓｕｎｇ Ｄｉｓｐｌａｙ Ｃｏ．，Ｌｔｄ．

H05B33/10; C23C14/24; G09F9/30; H01L27/32; H01L51/50; H05B33/12

Nobuyuki Matsunaga
Crossing Tetsuji
Hidekazu Miyoshi
Masakazu Ito

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