Title:
研磨装置
Document Type and Number:
Japanese Patent JP5682842
Kind Code:
B2
Inventors:
星野 進
Application Number:
JP2013197456A
Publication Date:
March 11, 2015
Filing Date:
September 24, 2013
Export Citation:
Assignee:
株式会社ニコン
International Classes:
B24B31/00
Attorney, Agent or Firm:
Shogo Onishi
Hiroshi Kawano
Toshiaki Namiki
Hiroshi Kawano
Toshiaki Namiki