Title:
基板処理装置及び基板処理方法
Document Type and Number:
Japanese Patent JP5686640
Kind Code:
B2
More Like This:
Inventors:
藤井 佳詞
Application Number:
JP2011059346A
Publication Date:
March 18, 2015
Filing Date:
March 17, 2011
Export Citation:
Assignee:
株式会社アルバック
International Classes:
H01L21/677; H01L21/205; H01L21/3065
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Shingo Suzuki
Previous Patent: ダイナミック型製氷システムおよびダイナミック型製氷方法
Next Patent: METHOD OF STAKING RIVETS WITH ONLY DIFFERENCE IN HEIGHT UNDER THE SAME CONDITIONS
Next Patent: METHOD OF STAKING RIVETS WITH ONLY DIFFERENCE IN HEIGHT UNDER THE SAME CONDITIONS