Title:
基板をフォトイメージングする方法及び装置
Document Type and Number:
Japanese Patent JP5690334
Kind Code:
B2
Abstract:
A method includes providing a substrate having a layer of photosensitive material thereon and a mask having contiguous first, second, and third portions; and sequentially: i) scanning the first portion with a light beam at a first rate and subsequently impinges on the photosensitive material at an exposure zone; ii) fixing the scanning within the second portion; and iii) resuming scanning through the third portion. Throughout the process the substrate moves through the exposure zone. An apparatus for carrying out the process includes a light beam source, a mask mount, a mask stage, a conveyor assembly, and at least one optical element for manipulating the light beam into a rectangular light beam.
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Inventors:
ティス， ダニエル， ジェイ．
ビイクリ， レヴェント
トキエ， ジェフリー， エイチ．
ホーフェルト， デヴィッド， エル．
ビイクリ， レヴェント
トキエ， ジェフリー， エイチ．
ホーフェルト， デヴィッド， エル．
Application Number:
JP2012513096A
Publication Date:
March 25, 2015
Filing Date:
May 13, 2010
Export Citation:
Assignee:
スリーエム イノベイティブ プロパティズ カンパニー
International Classes:
G03F7/20; H01L21/677
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Ikeda Adult
Yoshinori Shimizu
Ikeda Adult