Title:
表面走査座標測定装置の制御方法及び制御装置
Document Type and Number:
Japanese Patent JP5690941
Kind Code:
B2
Abstract:
A method improves surface scanning measure machine speed while minimizing tip touchdown impact on the surface of the object being measured. Specifically, the method controls a surface scanning measuring machine having a probe head with a distal probe tip that contacts the surface of an object to be measured. To that end, the method selects a nominal initial contact point (on the surface) having a normal vector, and then moves the distal probe tip toward the nominal initial contact point along an approach path. The approach path has a generally linear portion that generally linearly extends from the nominal initial contact point to some non-contacting point spaced from the surface. The generally linear portion forms an angle of between about 20 degrees and about 60 degrees with the normal vector.
Inventors:
ラシーン，ポール・ピー
Application Number:
JP2013529254A
Publication Date:
March 25, 2015
Filing Date:
September 13, 2011
Export Citation:
Assignee:
ヘキサゴン・テクノロジー・センター・ゲーエムベーハーＨＥＸＡＧＯＮ ＴＥＣＨＮＯＬＯＧＹ ＣＥＮＴＥＲ ＧＭＢＨ
International Classes:
G01B5/008; G01B5/20
Attorney, Agent or Firm:
Patent business corporation Tsukuni
Hajime Tsukuni
Yasuo Yanagibashi
Ito 佐保子
Keiko Ozawa
Toshio Miyake
Yasuhiro Kokuni
Yoko Tanaka
Yoshinori Ubukawa
Akio Shibata
Hajime Tsukuni
Yasuo Yanagibashi
Ito 佐保子
Keiko Ozawa
Toshio Miyake
Yasuhiro Kokuni
Yoko Tanaka
Yoshinori Ubukawa
Akio Shibata