Title:
周縁露光装置、周縁露光方法及び記憶媒体
Document Type and Number:
Japanese Patent JP5692106
Kind Code:
B2
Inventors:
Norihisa Koga
Application Number:
JP2012020114A
Publication Date:
April 01, 2015
Filing Date:
February 01, 2012
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G03F7/20; H01L21/027; H01L21/683
Domestic Patent References:
| JP6176408A | ||||
| JP10218364A | ||||
| JP2008085242A | ||||
| JP2010016208A | ||||
| JP2010052051A | ||||
| JP2010064159A | ||||
| JP2010253636A |
Attorney, Agent or Firm:
Toshio Inoue
Tomoaki Miida
Tomoaki Miida