Title:
斜めのビュー角度をもつ検査システム
Document Type and Number:
Japanese Patent JP5702045
Kind Code:
B2
Abstract:
Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
Inventors:
Corengat, Delon
Cohen, Vimin
Getter, aviche
Cohen, Vimin
Getter, aviche
Application Number:
JP2008181750A
Publication Date:
April 15, 2015
Filing Date:
July 11, 2008
Export Citation:
Assignee:
Applied Materials Israel Limited
International Classes:
G01N21/956; G01B11/30; G01N21/47; G01N21/88; G01N21/95; G02B27/48
Domestic Patent References:
| JP2002519694A | ||||
| JP2176984A | ||||
| JP10335240A | ||||
| JP2000171721A | ||||
| JP2000136910A | ||||
| JP9305094A | ||||
| JP57103403U |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Nobuhiko Suzuki
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Hiroshi Uesugi
Nobuhiko Suzuki