Title:
疎油性被覆のための直接液体蒸発
Document Type and Number:
Japanese Patent JP5706004
Kind Code:
B2
Abstract:
This is directed to a liquid vaporization process for depositing an oleophobic ingredient on a surface of an electronic device component using a PVD process. A raw liquid material that includes the oleophobic ingredient can be placed in a liquid supply system coupled to a vacuum chamber. The liquid supply system can be pressured by an inert gas to prevent undesired chemical reactions between the oleophobic ingredient and air. The liquid, including the oleophobic ingredient, can vaporize upon reaching the vaporizing unit, and the oleophobic ingredient can be deposited on the component.
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Inventors:
Weber, Douglas Joseph
Naoto Matsuyuki
Naoto Matsuyuki
Application Number:
JP2013553609A
Publication Date:
April 22, 2015
Filing Date:
February 10, 2012
Export Citation:
Assignee:
Apple Inc.
International Classes:
C23C14/24
Domestic Patent References:
| JP2010532426A | ||||
| JP2003155553A | ||||
| JP2008527174A |
Foreign References:
| WO2003085157A1 | ||||
| WO2008053712A1 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu