Title:
別体式気体浮上装置
Document Type and Number:
Japanese Patent JP5707515
Kind Code:
B2
Abstract:
A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2′a, 2′b, 2′c, 2′d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2′a, 2′b, 2′c, 2′d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.
Inventors:
Lee
Person
Chung coconut
Summer sea
Kure Standing Wei
Person
Chung coconut
Summer sea
Kure Standing Wei
Application Number:
JP2013553774A
Publication Date:
April 30, 2015
Filing Date:
February 13, 2012
Export Citation:
Assignee:
Shanghai Micro Denki Device Equipment Co., Ltd.
International Classes:
F16C32/06; G03F7/20; H01L21/027
Domestic Patent References:
| JP2004152941A | ||||
| JP2004331265A | ||||
| JP2009019688A | ||||
| JP2007024314A | ||||
| JP2003321117A |
Attorney, Agent or Firm:
Ken Ieiri