Title:
基板の気相化学エッチング方法
Document Type and Number:
Japanese Patent JP5714348
Kind Code:
B2
Inventors:
Sugimori Teruhiko
Application Number:
JP2011017139A
Publication Date:
May 07, 2015
Filing Date:
January 28, 2011
Export Citation:
Assignee:
Nano Photonics Engineering Promotion Organization
International Classes:
H01L21/302
Domestic Patent References:
| JP2003151871A | ||||
| JP10223575A |
Attorney, Agent or Firm:
Yasuhiko