Title:
微細孔検査装置及び微細孔検査方法
Document Type and Number:
Japanese Patent JP5715516
Kind Code:
B2
Inventors:
Sakagami Eimatsu
Takeshi Mukaiyama
Yoshinori Nagasu
Takeshi Mukaiyama
Yoshinori Nagasu
Application Number:
JP2011154361A
Publication Date:
May 07, 2015
Filing Date:
July 12, 2011
Export Citation:
Assignee:
Misuzu Corporation
Nagano Prefecture
Nagano Prefecture
International Classes:
G01B17/00
Domestic Patent References:
| JP2028552A | ||||
| JP2006132997A | ||||
| JP2001330593A | ||||
| JP8178641A | ||||
| JP10260168A |
Attorney, Agent or Firm:
Seigo Matsuo
Previous Patent: 樹脂組成物並びにこれを用いた成形体、多層構造体及びバッグインボック...
Next Patent: TUNING FORK TYPE QUARTZ OSCILLATOR
Next Patent: TUNING FORK TYPE QUARTZ OSCILLATOR