Title:
共鳴周波数に基づく圧力センサ
Document Type and Number:
Japanese Patent JP5719921
Kind Code:
B2
Abstract:
A pressure sensor for sensing a pressure of a process fluid includes a sensor body exposed to the pressure of the process fluid. The sensor body deforms in response to the pressure. A diaphragm suspended from the sensor body has a tension which changes in response to deformation of the sensor body. A resonate frequency of the diaphragm is measured. The measured resonant frequency is indicative of the line pressure of the process fluid and integrity of the isolation fill fluid system. In addition to measuring the resonant frequency, the oscillation mode itself can be used as a diagnostic tool to assess sensor health.
Inventors:
Kurosinski, Andrew, Jay.
Wilcox, Charles, Earl.
Wilcox, Charles, Earl.
Application Number:
JP2013502589A
Publication Date:
May 20, 2015
Filing Date:
March 03, 2011
Export Citation:
Assignee:
Rosemount Incorporated
International Classes:
G01L9/00; G01L13/06
Domestic Patent References:
| JP58165639U | ||||
| JP2008542717A | ||||
| JP3255327A | ||||
| JP5044615B2 | ||||
| JP3211432A | ||||
| JP2007256287A | ||||
| JP2002131331A | ||||
| JP2007086002A | ||||
| JP11506832A | ||||
| JP62140040A |
Attorney, Agent or Firm:
Kiyotaka Sakamoto
Kaori Tanaka
Sanji Tanabe
Kaori Tanaka
Sanji Tanabe