Title:
顕微鏡システム
Document Type and Number:
Japanese Patent JP5721042
Kind Code:
B2
Abstract:
A microscope system as an optical microscope system for observing a specimen includes: an imaging optical system that forms an image of transmitted light or reflected light from the specimen; an illumination light source that illuminates illumination light on the specimen; an illumination optical system that has a first spatial light modulation element, which changes intensity distribution of the illumination light at a conjugate position of a pupil of the imaging optical system, and illuminates light, which is originated from the illumination light source, on the specimen; an image sensor that detects light through the imaging optical system; and a calculation section that calculates the intensity distribution of the illumination light appropriate for observation of the specimen on the basis of the intensity distribution of the illumination light formed by the first spatial light modulation element and output data detected by the image sensor.
Inventors:
Hiroshi Oki
Application Number:
JP2010235155A
Publication Date:
May 20, 2015
Filing Date:
October 20, 2010
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B21/14
Domestic Patent References:
| JP2003121749A | ||||
| JP2000502472A | ||||
| JP2004101871A | ||||
| JP8327324A |
Attorney, Agent or Firm:
Nobukazu Ito