Title:
形状検査方法、構造物の製造方法及び形状検査装置
Document Type and Number:
Japanese Patent JP5728089
Kind Code:
B2
More Like This:
Inventors:
Hidekazu Hayashi
Tokio Taguchi
Chiaki Mitsunari
Tokio Taguchi
Chiaki Mitsunari
Application Number:
JP2013523887A
Publication Date:
June 03, 2015
Filing Date:
June 29, 2012
Export Citation:
Assignee:
Sharp Corporation
International Classes:
G01N21/27; G01N21/84; H01L21/027
Domestic Patent References:
JP2001221617A | ||||
JP2010122599A | ||||
JP2010048777A | ||||
JP2009168593A | ||||
JP2012255652A |
Foreign References:
WO2011145625A1 | ||||
WO2011118596A1 |
Attorney, Agent or Firm:
Atomi International Patent Office
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