Title:
超音波振動子ユニット及び超音波プローブ
Document Type and Number:
Japanese Patent JP5728635
Kind Code:
B2
Abstract:
In an ultrasonic transducer unit comprising a plurality of ultrasonic transducers, each of the ultrasonic transducers is provided with a recess formed in one face of an insulating substrate, and a substrate-side electrode is buried in a bottom of the recess, and a vibrating membrane is formed so as to cover the recess.
Inventors:
Lee Noboru
Application Number:
JP2012501903A
Publication Date:
June 03, 2015
Filing Date:
February 28, 2011
Export Citation:
Assignee:
Lee Noboru
International Classes:
H04R19/00
Domestic Patent References:
| JP2008110059A | 2008-05-15 | |||
| JP2006516368A | 2006-06-29 | |||
| JP2008110059A | 2008-05-15 |
Foreign References:
| WO2009069555A1 | 2009-06-04 | |||
| WO2005120130A1 | 2005-12-15 | |||
| WO2009069555A1 | 2009-06-04 |
Attorney, Agent or Firm:
Nobuyuki Yamaguchi