Title:
自己画像形成性フィルム形成ポリマー、その組成物、並びにそれから製造されるデバイス及び構造物
Document Type and Number:
Japanese Patent JP5728762
Kind Code:
B2
Abstract:
Polymers and compositions for forming self-imageable films encompassing such polymers that encompass norbornene-type repeating unit having at least one phenolic functionality and maleic anhydride-type repeating unit, which can be formulated to be either positive tone imaging or negative tone imaging. The films formed thereby are useful as self-imageable layers in the manufacture of microelectronic, such as semiconductor, and optoelectronic devices.
Inventors:
Osamu Onishi
Yoshio Ikeda
Rose, Larry F
Kandanarachich, Pramod
Yoshio Ikeda
Rose, Larry F
Kandanarachich, Pramod
Application Number:
JP2013541038A
Publication Date:
June 03, 2015
Filing Date:
November 23, 2011
Export Citation:
Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
C08F222/06; C08L35/00; C08F232/00; C08J5/18; C08K5/41; C08K5/55; C08L45/00; C08L63/00; G03F7/004
Domestic Patent References:
| JP2002504573A | ||||
| JP2006291177A | ||||
| JP2000103819A | ||||
| JP11269234A |
Foreign References:
| WO2011002516A2 |
Attorney, Agent or Firm:
Shinjiro Ono
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Takumi Terachi
Yasushi Kobayashi
Shigeo Takeuchi
Osamu Yamamoto
Takumi Terachi