Title:
プレス装置
Document Type and Number:
Japanese Patent JP5730981
Kind Code:
B2
Inventors:
Kyoko Kobayashi
Hiroaki Nabeshima
Masahiko Hirano
Yukio Ishida
Hiroaki Nabeshima
Masahiko Hirano
Yukio Ishida
Application Number:
JP2013250256A
Publication Date:
June 10, 2015
Filing Date:
December 03, 2013
Export Citation:
Assignee:
Canon Machinery Inc.
International Classes:
H01L21/60; H01L33/62
Domestic Patent References:
| JP2012099719A |
Attorney, Agent or Firm:
Kunihiko Shiromura
Tsuyoshi Kumano
Reiko Maeda
Tsuyoshi Kumano
Reiko Maeda
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