Title:
光子ビーム走査装置及び光子ビーム走査方法
Document Type and Number:
Japanese Patent JP5737749
Kind Code:
B2
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Inventors:
Toshiki Kii
Application Number:
JP2011034193A
Publication Date:
June 17, 2015
Filing Date:
February 21, 2011
Export Citation:
Assignee:
Kyoto University
International Classes:
G21K5/02; G21K1/00; H05G1/02
Domestic Patent References:
| JP2009187725A | ||||
| JP2002540422A | ||||
| JP2010156556A | ||||
| JP2009135018A | ||||
| JP2010060543A | ||||
| JP2010276363A |
Attorney, Agent or Firm:
Patent Business Corporation Suncrest International Patent Office