Title:
半導体光学装置における空気媒質層の製造方法
Document Type and Number:
Japanese Patent JP5741957
Kind Code:
B2
Inventors:
Roh Changchang
Yellow key
Hironaka Guo
Wang Xing
Yellow key
Hironaka Guo
Wang Xing
Application Number:
JP2012068161A
Publication Date:
July 01, 2015
Filing Date:
March 23, 2012
Export Citation:
Assignee:
National Transportation University
International Classes:
H01L21/306
Domestic Patent References:
| JP2010509786A | ||||
| JP11097796A | ||||
| JP2003347587A | ||||
| JP2010098136A | ||||
| JP2010212718A | ||||
| JP2008519442A |
Attorney, Agent or Firm:
▲吉▼川 俊雄